Machine learning supported analysis of MOVPE grown β-Ga2O3 thin films on sapphire
Ta‐Shun Chou, Saud Bin Anooz, Raimund Grüneberg, Natasha Dropka, W. Miller, Thi Thuy Vi Tran, Jana Rehm, M. Albrecht, Andreas Popp
Topics & Concepts
Metalorganic vapour phase epitaxyEpitaxySapphireProcess (computing)Substrate (aquarium)Materials scienceGrowth rateWork (physics)Thin filmOptoelectronicsMineralogyComputer scienceChemistryOpticsNanotechnologyMathematicsMechanical engineeringEngineeringLaserPhysicsGeologyGeometryOceanographyLayer (electronics)Operating systemGa2O3 and related materialsZnO doping and propertiesGas Sensing Nanomaterials and Sensors