Perforated serpentine membrane with AlN as dielectric material shunt capacitive RF MEMS switch fabrication and characterization
Lakshmi Narayana Thalluri, Koushik Guha, K. Srinivasa Rao, G. Venkata Hari Prasad, K. Girija Sravani, K.S.R. Sastry, Appala Raju Kanakala, P. Bose Babu
Topics & Concepts
Materials scienceFabricationMicroelectromechanical systemsDielectricOptoelectronicsShunt (medical)PhotoresistCapacitive sensingSurface micromachiningMembraneCapacitorVoltagePerforationComposite materialLayer (electronics)Electrical engineeringGeneticsPathologyPunchingMedicineEngineeringAlternative medicineCardiologyBiologyAdvanced MEMS and NEMS TechnologiesAcoustic Wave Resonator TechnologiesPhotonic and Optical Devices