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Deposition of uniform diamond films on three dimensional Si spheres by using faraday cage in MPCVD reactor

Zhiliang Yang, Yuchen Liu, Zhijian Guo, Junjun Wei, Jinlong Liu, Liangxian Chen, Chengming Li

2023Diamond and Related Materials17 citationsDOI

Topics & Concepts

DiamondSiliconElectric fieldCoatingMaterials scienceFaraday cageChemical vapor depositionPlasmaSPHERESOpticsDeposition (geology)NanotechnologyComposite materialOptoelectronicsPhysicsMagnetic fieldSedimentBiologyQuantum mechanicsAstronomyPaleontologyDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsAdvanced Surface Polishing Techniques
Deposition of uniform diamond films on three dimensional Si spheres by using faraday cage in MPCVD reactor | Litcius