Laser induced ultrafast combustion synthesis of solution-based AlO<sub>x</sub> for thin film transistors
Emanuel Carlos, Spilios Dellis, N. Kalfagiannis, Λουκάς Κουτσοκέρας, Demosthenes C. Koutsogeorgis, Rita Branquinho, Rodrigo Martins, Elvira Fortunato
Abstract
Excimer laser annealing (ELA) combined with combustion synthesis leads to high quality metal oxide TFTs in a short processing time.
Topics & Concepts
Materials scienceThin-film transistorCombustionUltrashort pulseExcimer laserOxideLaserAnnealing (glass)OptoelectronicsMetalNanotechnologyMetallurgyOpticsPhysical chemistryChemistryLayer (electronics)PhysicsThin-Film Transistor TechnologiesSemiconductor materials and devicesSilicon Nanostructures and Photoluminescence