Controllable synthesis of core-shell SiO2@CeO2 abrasives for chemical mechanical polishing on SiO2 film

Li Wang, Li Wang, Wenxiang Xie, Jingwei Zhang, Dengyu Pan, Hongjiu Su, Shudong Wang, Shudong Wang

2023Colloids and Surfaces A Physicochemical and Engineering Aspects28 citationsDOI

Topics & Concepts

PolishingMaterials scienceChemical-mechanical planarizationCore (optical fiber)Shell (structure)Composite materialAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchAdvanced materials and composites