Atomistic understanding of interfacial processing mechanism of silicon in water environment: A ReaxFF molecular dynamics simulation
Song Yuan, Xiaoguang Guo, Penghui Li, Shuohua Zhang, Ming Li, Zhuji Jin, Renke Kang, Dongming Guo, Fumin Liu, Lemin Zhang
Topics & Concepts
ReaxFFAbrasiveMaterials scienceSiliconMolecular dynamicsAmorphous siliconAmorphous solidPassivationSubstrate (aquarium)Chemical engineeringHumidityComposite materialLayer (electronics)Chemical physicsNanotechnologyCrystalline siliconMetallurgyChemistryComputational chemistryCrystallographyThermodynamicsOceanographyInteratomic potentialPhysicsGeologyEngineeringDiamond and Carbon-based Materials ResearchAdvanced Surface Polishing TechniquesForce Microscopy Techniques and Applications