A 0.19e- rms Read Noise 16.7Mpixel Stacked Quanta Image Sensor With 1.1 μm-Pitch Backside Illuminated Pixels
Jiaju Ma, Dexue Zhang, Omar A. Elgendy, Saleh Masoodian
Abstract
This letter reports a 16.7 Mpixel, 3D-stacked backside illuminated Quanta Image Sensor (QIS) with 1.1 <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\mu \text{m}$ </tex-math></inline-formula> -pitch pixels which achieves 0.19 e- rms array read noise and 0.12 e- rms best single-pixel read noise under room temperature operation. The accurate photon-counting capability enables superior imaging performance under ultra-low-light conditions. The sensor supports programmable analog-to-digital convertor (ADC) resolution from 1–14 bits and video frame rates up to 40 fps with <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$4096\times4096$ </tex-math></inline-formula> resolution and 600 mW power consumption.