Junctionless SOI FinFET with advanced spacer techniques for sub-3 nm technology nodes
V. Bharath Sreenivasulu, Narendar Vadthiya
Topics & Concepts
ScalingMaterials scienceSilicon on insulatorDielectricQuantum capacitanceOptoelectronicsHigh-κ dielectricElectronCapacitanceSiliconNanotechnologyPhysicsQuantum mechanicsMathematicsElectrodeGeometrySemiconductor materials and devicesAdvancements in Semiconductor Devices and Circuit DesignFerroelectric and Negative Capacitance Devices