Effects of deposition temperature on microstructure, cation distribution and electrical properties of Mn1.56Co0.96Ni0.48O4 thin films grown by RF magnetron sputtering
Yiming Yin, Jing Wu, Wei Zhou, Wanli Ma, Lin Jiang, Yanqing Gao, Zhiming Huang
Topics & Concepts
X-ray photoelectron spectroscopyCrystallinitySputter depositionThin filmMaterials scienceElectrical resistivity and conductivityAnalytical Chemistry (journal)Deposition (geology)MicrostructureSputteringChemical engineeringChemistryMetallurgyNanotechnologyComposite materialElectrical engineeringSedimentChromatographyEngineeringPaleontologyBiologyElectrical and Thermal Properties of MaterialsGas Sensing Nanomaterials and SensorsTransition Metal Oxide Nanomaterials