Plasma-induced oxygen vacancies enabled ultrathin ZnO films for highly sensitive detection of triethylamine
Zishuo Li, Xianghong Liu, Miao Zhou, Shoulong Zhang, Shize Cao, Guanglu Lei, Chengming Lou, Jun Zhang
Topics & Concepts
Materials scienceTriethylamineAnnealing (glass)Thin filmWaferAtomic layer depositionOptoelectronicsPlasma etchingPlasmaEtching (microfabrication)SemiconductorOxideOxygenNanotechnologyAnalytical Chemistry (journal)Layer (electronics)ChemistryComposite materialMetallurgyOrganic chemistryQuantum mechanicsChromatographyPhysicsGas Sensing Nanomaterials and SensorsAdvanced Chemical Sensor TechnologiesZnO doping and properties