A review of the preparation and application of lead zirconate titanate (PZT) thin film sensors
Tianjian Zhao, Jinzhe Li, Yang Xue, Zhifu Yin
Abstract
This study systematically investigates the fabrication processes of lead zirconate titanate (PZT) thin-film sensors. It covers PZT synthesis methods ( e.g. , sol–gel, sputtering, pulsed laser deposition) and thin-film deposition techniques.
Topics & Concepts
Materials scienceLead zirconate titanateLead (geology)Lead titanateThin filmPerovskite (structure)FerroelectricityNanotechnologyChemical engineeringOptoelectronicsDielectricEngineeringGeomorphologyGeologyFerroelectric and Piezoelectric MaterialsElectronic and Structural Properties of OxidesAcoustic Wave Resonator Technologies