Modeling of surface microtopography evolution in chemical mechanical polishing considering chemical-mechanical synergy
Ke Yang, Ning Huang, Hongyu Di, Ping Zhou
Topics & Concepts
Chemical-mechanical planarizationPolishingTribologyMaterials scienceSurface (topology)Mechanical strengthNanotechnologyChemical engineeringComposite materialEngineeringGeometryMathematicsAdvanced Surface Polishing TechniquesAdvanced machining processes and optimizationLaser Material Processing Techniques