Rapid planarization of polycrystalline diamond by laser with response surface methodology
Sheng Ye, Shangman Zhao, Siwu Shao, Liangxian Chen, Yuting Zheng, Jinlong Liu, Vadim Sedov, Soumen Mandal, Chengming Li, Junjun Wei
Topics & Concepts
Chemical-mechanical planarizationPolycrystalline diamondMaterials scienceDiamondLaserCrystalliteSurface (topology)OptoelectronicsPolishingComposite materialOpticsMetallurgyMathematicsGeometryPhysicsDiamond and Carbon-based Materials ResearchAdvanced Surface Polishing TechniquesLaser Material Processing Techniques