Effects of the dynamic cathode sheath on electron transport at the initial period of HiPIMS pulse studied by Langmuir probe measurements and 2D PIC-MCC simulation
Mingyue Han, Yang Luo, Hua Li, Ye Xu, Sida Luo, Hao Xu, Changyun Xu, Liuhe Li
Topics & Concepts
High-power impulse magnetron sputteringLangmuir probeAtomic physicsElectronMaterials sciencePlasmaCathodeElectric fieldElectron temperaturePlasma diagnosticsPhysicsSputteringSputter depositionChemistryNanotechnologyThin filmPhysical chemistryQuantum mechanicsMetal and Thin Film MechanicsPlasma Diagnostics and ApplicationsDiamond and Carbon-based Materials Research