Litcius/Paper detail

Design and simulation of a novel MPCVD reactor with three-cylinder cavity

Yizhuo Zhang, Shengwang Yu, Jie Gao, Yong Ma, Zhiyong He, Hongjun Hei, Ke Zheng

2022Vacuum20 citationsDOI

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PlasmaElectric fieldCylinderMaterials scienceDiamondMicrowaveSubstrate (aquarium)MechanicsPower (physics)Nuclear engineeringIon sourceAnalytical Chemistry (journal)Atomic physicsOpticsChemistryPhysicsComposite materialMechanical engineeringThermodynamicsEngineeringOceanographyChromatographyQuantum mechanicsGeologyDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsSemiconductor materials and devices