Efficient Chemical Mechanical Polishing of AISI 52100 Bearing Steel with TiSol-NH4 Dispersion-Based Slurries
Hanqiang Wu, Liang Jiang, Jinwei Liu, Changbang Deng, Haifeng Huang, Linmao Qian
Topics & Concepts
Materials sciencePolishingChemical-mechanical planarizationAbrasiveSlurryDispersion stabilitySurface roughnessDispersion (optics)TribologyMetallurgyLayer (electronics)Composite materialComposite numberNanoparticleNanotechnologyPhysicsOpticsDiamond and Carbon-based Materials ResearchAdvanced Surface Polishing TechniquesMetal and Thin Film Mechanics