Erosion resistance of Y2O3 ceramics in CF4 etching plasma: Microstructural evolution and mechanical properties
Desen Zhao, Liuying Huang, Cai Gong, Yuxi Yu
Topics & Concepts
Materials scienceCeramicErosionEtching (microfabrication)PlasmaResistance (ecology)MicrostructureMetallurgyComposite materialMineralogyGeologyBiologyLayer (electronics)EcologyQuantum mechanicsPhysicsPaleontologyPlasma Diagnostics and ApplicationsMetal and Thin Film MechanicsAdvanced ceramic materials synthesis