A Complete Si Photonics Platform Embedding Ultra-Low Loss Waveguides for O- and C-Band
Quentin Wilmart, S. Brision, Jean‐Michel Hartmann, A. Myko, Karen Ribaud, Camille Petit-Étienne, Laurène Youssef, Daivid Fowler, Benoı̂t Charbonnier, Corrado Sciancalepore, E. Pargon, Stéphane Bernabé, Bertrand Szelag
Abstract
We report ultra-low propagation losses in silicon sub-micrometric waveguides on a 200 mm CMOS compatible photonics platform. We show median losses in C-band (O-band) as low as 0.1 dB/cm and 0.7 dB/cm (0.14 dB/cm and 1.1 dB/cm) in monomode rib and strip waveguides, respectively, thanks to a H2 smoothing annealing. In addition to the significant loss reduction, we show that the performance characteristic of the main passive and active components of the photonics platform are preserved or even improved by the smoothing process.
Topics & Concepts
PhotonicsMaterials scienceSilicon photonicsOptoelectronicsSmoothingOpticsCMOSAnnealing (glass)SiliconPhysicsComputer scienceComposite materialComputer visionPhotonic and Optical DevicesAdvanced Fiber Laser TechnologiesAdvanced Photonic Communication Systems