Compact silicon photonics circuit to extract multiple parameters for process control monitoring
Yufei Xing, Mi Wang, Alfonso Ruocco, Joris Geessels, Umar Khan, Wim Bogaerts
Abstract
We present a compact interferometer circuit to extract multiple model parameters of on-chip waveguides and directional couplers from optical measurements. The compact design greatly improves the accuracy of extraction with fewer measurements, making it useful for process monitoring and detailed wafer-level variability analysis. We discuss the design requirements and illustrate the extraction using the Restart-CMA-ES global optimization algorithm.
Topics & Concepts
InterferometryWaferChipProcess (computing)PhotonicsComputer scienceExtraction (chemistry)Electronic engineeringIntegrated circuitSilicon photonicsPhotonic integrated circuitEngineeringMaterials scienceOptoelectronicsOpticsPhysicsTelecommunicationsChromatographyChemistryOperating systemPhotonic and Optical DevicesOptical Network TechnologiesAdvanced Fiber Optic Sensors