Structural and Opto-electronic characterization of CuO thin films prepared by DC reactive magnetron sputtering
Xi Zeng, Maria Zhukova, Sébastien Faniel, Joris Proost, Denis Flandre
Topics & Concepts
Characterization (materials science)Materials scienceThin filmSputter depositionSputteringOptoelectronicsCavity magnetronHigh-power impulse magnetron sputteringNanotechnologyCopper-based nanomaterials and applicationsZnO doping and propertiesElectronic and Structural Properties of Oxides