Vertically grown metal nanosheets integrated with atomic-layer-deposited dielectrics for transistors with subnanometre capacitance-equivalent thicknesses
Lei Zhang, Zhaochao Liu, Wei Ai, Jiabiao Chen, Zunxian Lv, Bing Wang, Mingjian Yang, Feng Luo, Jinxiong Wu
Topics & Concepts
CapacitanceMaterials scienceAtomic layer depositionDielectricLayer (electronics)OptoelectronicsMetalTransistorHigh-κ dielectricNanotechnologyElectrical engineeringChemistryMetallurgyElectrodeVoltageEngineeringPhysical chemistrySemiconductor materials and devicesFerroelectric and Negative Capacitance DevicesNanowire Synthesis and Applications