Computational investigation of high-order mode localization in electrostatically coupled microbeams with distributed electrodes for high sensitivity mass sensing
Ming Lyu, Jian Zhao, Najib Kacem, Bin Tang, Pengbo Liu, Jiahao Song, Heng Zhong, Yu Huang
Topics & Concepts
Sensitivity (control systems)Coupling (piping)AliasingMode (computer interface)Materials scienceNonlinear systemElectrodeVoltageMetric (unit)Control theory (sociology)AcousticsPhysicsElectronic engineeringEngineeringComputer scienceElectrical engineeringOperations managementQuantum mechanicsFilter (signal processing)Control (management)Operating systemArtificial intelligenceMetallurgyMechanical and Optical ResonatorsAdvanced MEMS and NEMS TechnologiesForce Microscopy Techniques and Applications