Wafer-scale single-crystalline β-Ga2O3 thin film on SiC substrate by ion-cutting technique with hydrophilic wafer bonding at elevated temperatures
Zhenghao Shen, Wenhui Xu, Yang Chen, Jiajie Lin, Yuhuan Xie, Kai Huang, Tiangui You, Genquan Han, Xin Ou
Topics & Concepts
Materials scienceWaferSubstrate (aquarium)Thin filmAnodic bondingComposite materialBlistersSurface roughnessSilicon carbideWafer bondingOptoelectronicsNanotechnologyOceanographyGeologyGa2O3 and related materialsZnO doping and propertiesSemiconductor materials and devices