Evolution of nano-cracks in single-crystal silicon during ultraprecision mechanical polishing
Houfu Dai, Yuqi Zhou, Ping Li, Yunfei Zhang
Topics & Concepts
PolishingMaterials scienceClosure (psychology)Stress (linguistics)Displacement (psychology)Nano-SiliconComposite materialCrack closurePhase (matter)Chemical-mechanical planarizationMetallurgyFracture mechanicsEconomicsLinguisticsChemistryPhilosophyPsychotherapistPsychologyMarket economyOrganic chemistryAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchAdvanced machining processes and optimization