Atomic-scale silicidation of low resistivity Ni-Si system through in-situ TEM investigation
An-Yuan Hou, Yi-Hsin Ting, Kuo-Lun Tai, Chih‐Yang Huang, Kuo‐Chang Lu, Wen‐Wei Wu
Topics & Concepts
Materials scienceAnnealing (glass)SalicideSilicideFabricationElectrical resistivity and conductivityNickelMicroelectronicsSiliconEpitaxyOptoelectronicsAtomic diffusionThin filmNanotechnologyTransmission electron microscopyMetallurgyCrystallographyChemistryElectrical engineeringMedicineEngineeringAlternative medicineLayer (electronics)PathologySemiconductor materials and interfacesNanowire Synthesis and ApplicationsSilicon Nanostructures and Photoluminescence