Laser-lithographically written micron-wide superconducting nanowire single-photon detectors
Maximilian Protte, Varun Verma, Jan Philipp Höpker, Richard P. Mirin, Sae Woo Nam, Tim J. Bartley
Abstract
Abstract We demonstrate the fabrication of micron-wide tungsten silicide superconducting nanowire single-photon detectors on a silicon substrate using laser lithography. We show saturated internal detection efficiencies with wire widths ranging from 0.59 µ m to 1.43 µ m under illumination at 1550 nm. We demonstrate both straight wires, as well as meandered structures. Single-photon sensitivity is shown in devices up to 4 mm in length. Laser-lithographically written devices allow for fast and easy structuring of large areas while maintaining a saturated internal efficiency for wire widths around 1 µ m.
Topics & Concepts
Materials scienceNanowireOptoelectronicsLithographyDetectorLaserSilicideSubstrate (aquarium)TungstenFabricationSiliconOpticsPhotonPhysicsPathologyMetallurgyAlternative medicineGeologyMedicineOceanographyPhotonic and Optical DevicesAdvanced Optical Sensing TechnologiesMechanical and Optical Resonators