Mathematical modeling of different diaphragm geometries in MEMS pressure sensor
Sudarsana Jena, Chandan Pandey, Ankur Gupta
Topics & Concepts
Diaphragm (acoustics)Piezoresistive effectDisplacement (psychology)Finite element methodCapacitive sensingPressure sensorMicroelectromechanical systemsAcousticsStructural engineeringSensitivity (control systems)Materials scienceLinearityTransducerMechanical engineeringElectronic engineeringEngineeringVibrationElectrical engineeringNanotechnologyOptoelectronicsPhysicsPsychotherapistPsychologyAdvanced MEMS and NEMS TechnologiesMechanical and Optical ResonatorsAcoustic Wave Resonator Technologies