Fabrication and characterization of high-temperature AlN thick-film piezoelectric accelerometer
Ting Lv, Vasiliy Pelenovich, Chang Xu, Xiaomei Zeng, Dongyang Hou, Zechang Xiong, Bing Yang, Fang Dong, Sheng Liu
Topics & Concepts
Materials scienceFabricationCharacterization (materials science)PiezoelectricityAccelerometerComposite materialOptoelectronicsEngineering physicsNanotechnologyComputer scienceEngineeringPathologyAlternative medicineMedicineOperating systemAdvanced MEMS and NEMS TechnologiesAcoustic Wave Resonator TechnologiesElectrical and Thermal Properties of Materials