The influence of nitrogen on the morphology of ZrN coatings deposited by magnetron sputtering
T. A. Kuznetsova, V. A. Lapitskaya, Anastasiya Khabarava, С. А. Чижик, B. Warcholiński, A. Gilewicz
Topics & Concepts
Materials scienceNanoindentationScanning electron microscopeCavity magnetronCrystalliteSputter depositionSubstrate (aquarium)Texture (cosmology)SputteringComposite materialMetallurgyNitrogenThin filmNanotechnologyChemistryArtificial intelligenceImage (mathematics)Organic chemistryGeologyComputer scienceOceanographyMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchIon-surface interactions and analysis