Enhancing piezoelectric response in (002)-Oriented TaxAl(1−x)N films by magnetron-sputtering composition-tunable AlTa alloys
Xueqian Yang, Jing Sun, Gongtian Chen, Hongcai Yu, Xiangping Zhang, Gang Tang, Wang Zhou, Yingguo Yang, Chao Ma, Jiawang Hong, Bin Yang, Jiawang Hong, Bin Yang
Topics & Concepts
Wurtzite crystal structureMaterials sciencePiezoelectricityDopingSputter depositionNitrideThin filmSputteringOptoelectronicsComposite materialNanotechnologyMetallurgyLayer (electronics)ZincAcoustic Wave Resonator TechnologiesGaN-based semiconductor devices and materialsFerroelectric and Piezoelectric Materials