High energy (MeV) ion beam induced modifications in Al2O3-ZnO multilayers thin films grown by ALD and enhancement in photoluminescence, optical and structural properties
Deepika Gupta, Vishnu Chauhan, Nikhil Koratkar, Fouran Singh, Ashok Kumar, Shalendra Kumar, Rajesh Kumar
Topics & Concepts
PhotoluminescenceMaterials scienceFluenceSwift heavy ionIon beamIrradiationOptoelectronicsBand gapThin filmAtomic layer depositionLuminescenceIonCrystalliteSiliconAnalytical Chemistry (journal)NanotechnologyChemistryNuclear physicsMetallurgyOrganic chemistryChromatographyPhysicsSemiconductor materials and devicesIon-surface interactions and analysisZnO doping and properties