Optimization of growth parameters of AlN thin films and investigation of electrical and electroluminescence characteristics from Au/i-AlN/n-GaN UV light-emitting diode
Jiahui Zhang, Wenbo Peng, Yijian Zhou, Yue Liu, Guojiao Xiang, Jinming Zhang, Haoxuan Huang, Mengyan Mei, Yang Zhao, Hui Wang
Topics & Concepts
Materials scienceOptoelectronicsElectroluminescenceThin filmDiffractometerLight-emitting diodeArgonSubstrate (aquarium)Sputter depositionNitrideSputteringScanning electron microscopeNanotechnologyComposite materialLayer (electronics)Atomic physicsGeologyPhysicsOceanographyGaN-based semiconductor devices and materialsMetal and Thin Film MechanicsZnO doping and properties