High speed and low roughness micromachining of silicon carbide by plasma etching aided femtosecond laser processing
Chen Wu, Xudong Fang, Feng Liu, Xin Guo, Ryutaro Maeda, Zhuangde Jiang
Topics & Concepts
Materials scienceSurface micromachiningMachiningSurface roughnessLaser beam machiningFemtosecondLaserEtching (microfabrication)Silicon carbideLaser power scalingOpticsSiliconOptoelectronicsComposite materialMetallurgyFabricationMedicineLayer (electronics)PathologyLaser beamsAlternative medicinePhysicsLaser Material Processing TechniquesAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials Research