A review of defect engineering, ion implantation, and nanofabrication using the helium ion microscope
Frances I. Allen
Abstract
The helium ion microscope has emerged as a multifaceted instrument enabling a broad range of applications beyond imaging in which the finely focused helium ion beam is used for a variety of defect engineering, ion implantation, and nanofabrication tasks. Operation of the ion source with neon has extended the reach of this technology even further. This paper reviews the materials modification research that has been enabled by the helium ion microscope since its commercialization in 2007, ranging from fundamental studies of beam-sample effects, to the prototyping of new devices with features in the sub-10 nm domain.
Topics & Concepts
Field ion microscopeNanolithographyIon implantationMaterials scienceHeliumFocused ion beamIon beamNanotechnologyMicroscopeIonNeonOpticsAtomic physicsChemistryPhysicsFabricationArgonOrganic chemistryPathologyMedicineAlternative medicineIntegrated Circuits and Semiconductor Failure AnalysisElectron and X-Ray Spectroscopy TechniquesAdvanced Electron Microscopy Techniques and Applications