Nonthermal Plasma-Enhanced Chemical Vapor Deposition of Two-Dimensional Molybdenum Disulfide
Chad A. Beaudette, Jacob T. Held, K. Andre Mkhoyan, Uwe Kortshagen
Abstract
) films were formed at low precursor concentrations. Films with nanoparticle-like features were formed when the precursor concentration was high. Noncontinuous nonstoichiometric films were found at low plasma power, while high plasma power led to continuous films with good stoichiometry. The vacancies and defects in these films may provide active sites for hydrogen evolution.
Topics & Concepts
Molybdenum disulfideChemical vapor depositionMolybdenumPlasmaMaterials scienceChemical engineeringDisulfide bondDeposition (geology)ChemistryInorganic chemistryNanotechnologyMetallurgyGeologyBiochemistryPhysicsEngineeringPaleontologyQuantum mechanicsSediment2D Materials and ApplicationsMXene and MAX Phase MaterialsGraphene research and applications