Elimination of blind zone in nanoparticle removal on silicon wafers using a double-beam laser shockwave cleaning process
Shuowen Zhang, Qingyu Yan, Jian Lin, Qunli Zhang, Yongfeng Lu, Jianhua Yao, Lisha Fan
Topics & Concepts
WaferMaterials scienceNanoparticleSiliconLaser beamsProcess (computing)LaserBeam (structure)OptoelectronicsOpticsNanotechnologyProcess engineeringEngineeringComputer sciencePhysicsOperating systemLaser-induced spectroscopy and plasmaLaser Material Processing TechniquesLaser-Ablation Synthesis of Nanoparticles