Visualization of threading dislocations in an α-Ga2O3 epilayer by HCl gas etching
Yuichi Oshima, Shingo Yagyu, Takashi Shinohe
Topics & Concepts
DislocationEpitaxyEtching (microfabrication)Materials scienceTransmission electron microscopyEtch pit densityCrystallographyThreading (protein sequence)Isotropic etchingOptoelectronicsChemistryComposite materialNanotechnologyLayer (electronics)BiochemistryProtein structureGa2O3 and related materialsZnO doping and propertiesAdvanced Photocatalysis Techniques