Microstructure, mechanical and tribological properties of Ti doped ta-C films deposited by a hybrid coating system
Ji Cheng Ding, Yang Cheng, Shihong Zhang, Qimin Wang, Teng Fei Zhang
Topics & Concepts
Materials scienceMicrostructureAmorphous solidSputter depositionComposite materialResidual stressNanocompositeDopingCoatingTribologyAmorphous carbonThin filmSputteringNanotechnologyCrystallographyChemistryOptoelectronicsDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsAdvanced materials and composites