Metrology applications using off-axis digital holography microscopy
Yves Emery, Tristan Colomb, Etienne Cuche
Abstract
Abstract Off-axis digital holography microscopy (DHM) systems have evolved during these last two decades from research to commercial instrumentation. They are used in many research laboratories and production facilities as metrology instruments in a large variety of applications including dimensional, surface topography, birefringence, oxide patterns thickness, and vibration characterization. The unique non-scanning quasi-instantaneous acquisition specificity of DHM opens new 4D metrology possibilities for observation of non-static scenes, operation in noisy environments, high throughput screening, and for providing fast feedback during manufacturing processes using artificial intelligence for decision making. These aspects are discussed and illustrated in this paper with the presentation of several applications to technical samples.