Job scheduling of diffusion furnaces in semiconductor fabrication facilities
Kan Wu, Edward Huang, Mengchang Wang, Meimei Zheng
Topics & Concepts
Computer scienceScheduling (production processes)Job shop schedulingFlow shop schedulingSemiconductor device fabricationMathematical optimizationFair-share schedulingJob schedulerDistributed computingDynamic priority schedulingIndustrial engineeringEngineeringEmbedded systemMathematicsComputer networkQueueRouting (electronic design automation)Quality of serviceElectrical engineeringWaferScheduling and Optimization AlgorithmsAdvanced Manufacturing and Logistics OptimizationAdvanced Control Systems Optimization