Large plasmonic color metasurfaces fabricated by super resolution deep UV lithography
M. Keil, Alexandre Wetzel, Kaiyu Wu, Elena Khomtchenko, Jitka Urbankova, Anja Boisen, Tomas Rindzevicius, Ada‐Ioana Bunea, Rafael Taboryski
Abstract
nanostructure arrays can be written in only a few minutes, which is a tremendous improvement compared to the more established techniques employed for fabricating similar structures.
Topics & Concepts
PlasmonLithographyMaterials scienceOptoelectronicsOpticsExtreme ultraviolet lithographyPhysicsPlasmonic and Surface Plasmon ResearchGold and Silver Nanoparticles Synthesis and ApplicationsMetamaterials and Metasurfaces Applications