Insight into high temperature performance of magnetron sputtered Si-Ta-C-(N) coatings with an ion-implanted interlayer
Andrey Bondarev, M.N. Antonyuk, Ph. V. Kiryukhantsev–Korneev, Tomáš Polcar, Dmitry V. Shtansky
Topics & Concepts
Materials scienceAmorphous solidSputter depositionCrystalliteCoatingAnnealing (glass)NanocompositeSputteringComposite materialMetallurgyChemical engineeringThin filmNanotechnologyCrystallographyEngineeringChemistryMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchBoron and Carbon Nanomaterials Research