Litcius/Paper detail

Study on nano silicon carbide water-based cutting fluid in polysilicon cutting

Chunyan Yao, Dongdong Chen, Kaixiang Xu, Zhongli Zheng, Qiangsheng Wang, Yunfeng Liu

2020Materials Science in Semiconductor Processing17 citationsDOI

Topics & Concepts

Materials scienceSilicon carbideCutting fluidBreakageSurface roughnessWaferLubricationComposite materialDiamondEnhanced Data Rates for GSM EvolutionSiliconNano-Surface finishMetallurgyNanotechnologyMachiningTelecommunicationsComputer scienceAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchAdvanced machining processes and optimization