Multiparametric analytical quantification of materials at nanoscale in tapping force microscopy
Amir Farokh Payam, Alessio Morelli, Patrick Lemoine
Topics & Concepts
Characterization (materials science)NanoindentationNanoscopic scaleMaterials scienceAtomic force microscopyNanotechnologyNanometrologyViscoelasticityComposite materialForce Microscopy Techniques and ApplicationsIntegrated Circuits and Semiconductor Failure AnalysisNear-Field Optical Microscopy