Progress of optomechanical micro/nano sensors: a review
Xinmiao Liu, Weixin Liu, Zhihao Ren, Yiming Ma, Bowei Dong, Guangya Zhou, Chengkuo Lee
Abstract
10.1080/15599612.2021.1986612
Topics & Concepts
PhysicsOptomechanicsSensitivity (control systems)FootprintVibrationInertiaCoupling (piping)AcousticsNanotechnologyOptoelectronicsMaterials scienceElectronic engineeringEngineeringMechanical engineeringClassical mechanicsPaleontologyResonatorBiologyMechanical and Optical ResonatorsAdvanced MEMS and NEMS TechnologiesPhotonic and Optical Devices