ITO films with different preferred orientations prepared by DC magnetron sputtering
Kunzhe Wang, Peiwen Jiao, Yuanyuan Cheng, Huarui Xu, Guisheng Zhu, Yunyun Zhao, Kunpeng Jiang, Xiuyun Zhang, Yuangui Su
Topics & Concepts
Materials scienceSputteringTransmittanceDangling bondSputter depositionCeramicOptoelectronicsThin filmComposite materialSiliconNanotechnologyZnO doping and propertiesGas Sensing Nanomaterials and SensorsGaN-based semiconductor devices and materials