Femtosecond laser single step, full depth cutting of thick silicon sheets with low surface roughness
Zhaoqing Li, Olivier Allegre, Qianliang Li, Wei Guo, Lin Li
Topics & Concepts
Materials scienceFemtosecondLaser cuttingSurface roughnessWaferWafer dicingOpticsLaserSiliconSurface finishMachiningEnhanced Data Rates for GSM EvolutionLaser beam machiningOptoelectronicsComposite materialLaser beamsMetallurgyPhysicsTelecommunicationsComputer scienceLaser Material Processing TechniquesAdvanced Surface Polishing TechniquesSurface Roughness and Optical Measurements