Fabrication of micro/nano multifunctional patterns on optical glass through chalcogenide heat-mode resist AgInSbTe
Guodong Chen, Jinlun Zheng, Zhengwei Wang, Kui Zhang, Zhichang Mo, Xing Liu, Tianyu Gao, Yang Wang, Jingsong Wei
Topics & Concepts
ResistMaterials scienceFabricationChalcogenidePlasma etchingEtching (microfabrication)Reactive-ion etchingDry etchingOptoelectronicsNanolithographyLaserNanotechnologyPhotolithographyOpticsLayer (electronics)MedicinePhysicsAlternative medicinePathologyPhase-change materials and chalcogenidesPhotonic and Optical DevicesOptical Coatings and Gratings