Reaction mechanisms of the initial steps for the oxidation of (000<mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" altimg="si1.svg"><mml:mover accent="true"><mml:mn>1</mml:mn><mml:mo>¯</mml:mo></mml:mover></mml:math>) C and (0001) Si faces of SiC with OH radicals
Megumi Kayanuma, Tomohisa Kato, Tetsuya Morishita
Topics & Concepts
Dissociation (chemistry)ChemistryRadicalCrystallographyDensity functional theoryAtom (system on chip)MoleculeComputational chemistryPhysical chemistryOrganic chemistryEmbedded systemComputer scienceSilicon Carbide Semiconductor TechnologiesSemiconductor materials and devicesAdvanced ceramic materials synthesis