Stepwise growth of crystalline MoS<sub>2</sub> in atomic layer deposition
Ah-Jin Cho, Seung Ho Ryu, Jae Gyun Yim, In‐hwan Baek, Jung Joon Pyeon, Sung Ok Won, Seung‐Hyub Baek, Chong‐Yun Kang, Seong Keun Kim
Abstract
Atomic layer deposition of MoS 2 reveals stepwise growth – ‘stop and go’ growth of MoS 2 – behavior where the surface migration energy of the adsorbates is significantly enhanced.
Topics & Concepts
Materials scienceAtomic layer depositionLayer (electronics)Deposition (geology)Chemical engineeringNanotechnologyChemical physicsChemistrySedimentPaleontologyBiologyEngineering2D Materials and ApplicationsMXene and MAX Phase MaterialsAdvanced Photocatalysis Techniques